TOM 9 – Frontiers in Optical Metrology

Location: 
Berlin Adlershof, Germany
Part of: 
EOSAM 2014
Duration: 
15 September 2014 - 19 September 2014
Submission Timeframe: 
28 February 2014 - 4 April 2014

TOPICS

Topics include but are not limited to:

  • Modelling of light-structure interaction
  • Quantitative optical inspection methods
  • High-NA systems
  • 3D-Metrology
  • Form and surface metrology
  • Quantum enhanced optical  sensors
  • Optical length metrology
  • Aberration retrieval
  • Remote sensing
  • Scatterometry
  • Ellipsometry
  • Interferometry and holography
  • Deflectometry

CHAIRS

  • Chair: Bernd Bodermann, Physikalisch-Technische Bundesanstalt (PTB) (DE) 
  • Co-chair: Omar El Gawhary, Van Swinden Laboratory (VSL) (NL)

PROGRAMME COMMITTEE

  • Axel Wiegmann, Physikalisch-Technische Bundesanstalt (PTB) (DE)
  • Dirk Voigt, VSL Dutch Metrology Institute (NL)
  • Jens Flügge, Physikalisch-Technische Bundesanstalt (PTB) (DE)
  • Martin Foldyna, École Polytechnique (FR)

PLENARY SPEAKER

  • H. Philip Stahl, NASA MSFC, SPIE President (US) 

INVITED SPEAKERS

  • John Rodenburg, Sheffield University (GB)
  • Matthias Richter, PTB (DE)
  • Gunther Notni, Universität Jena (DE): High-resolution dynamic 3D-shape measurement
  • Vittorio Giovannetti, Scuola Normale di Pisa (IT)